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International Standard Category: Testing of metals in general

GB/T 14140.2-1993    Silicon slices and wafers-Measuring of diameter-Micrometer method
硅片直径测量方法 千分尺法 ;
Category No.:77.040.01 Valid Status:abolished
Issued Organization:CSBTS Issued Date:1993-02-06
Implemented Date:1993-10-1 Abolished Date:2010-06-01
Superseded Standard.:GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
Superseded Date:2010-6-1
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