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| International Standard Category: Semiconducting materials |
GB/T 14141-2009 Test method for sheet resistance of silicon epitaxial,diffused and ion-implanted layers using a collinear four-probe array
硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法;
| Category No.: | 29.045 | Valid Status: | valid |
| Issued Organization: | AQSIQ; SAC | Issued Date: | 2009-10-30 |
| Implemented Date: | 2010-6-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
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