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| International Standard Category: Testing of metals in general |
GB/T 19922-2005 Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
硅片局部平整度非接触式标准测试方法;
| Category No.: | 77.040.01 | Valid Status: | valid |
| Issued Organization: | AQSIQ;SAC | Issued Date: | 2005-9-19 |
| Implemented Date: | 2006-4-1 | Abolished Date: | |
| Superseded Standard.: | Superseded Date: |
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