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International Standard Category: Semiconducting materials

GB/T 6616-2009    Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法;
Category No.:29.045 Valid Status:superseded
Issued Organization:AQSIQ; SAC Issued Date:2009-10-30
Implemented Date:2010-6-1 Abolished Date:
Superseded Standard.:GB/T 6616-2023 Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films—Noncontact eddy-current gauge
Superseded Date:2024-3-1
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