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| International Standard Category: Semiconducting materials |
YS/T 26-1992 Test method for silicon wafer edge
硅片边缘轮郭检验方法;
| Category No.: | 29.045 | Valid Status: | superseded |
| Issued Organization: | China Nonferrous Metals Industry Corporation | Issued Date: | 1992-3-9 |
| Implemented Date: | 1993-1-1 | Abolished Date: | |
| Superseded Standard.: | YS/T 26-2016 Test methods for edge contour of silicon wafers |
Superseded Date: | 2017-1-1 |
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