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Chinese National Standard Category: Basic standards and general methods

English Title: Evaluation of thickness, density and interface width of thin films by X-ray reflectometry—Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Chinese Title: X射线反射法测量薄膜的厚度、密度和界面宽度 仪器要求、准直和定位、数据采集、数据分析和报告
Standard No.: GB/T 36053-2018
Category No.: G04
Issued by: AQSIQ; SAC
Issued on: 2018-03-15
Implemented on: 2019-2-1
Status: valid
Superseded by:
Superseded on:
Abolished on:
Superseding:
Word Count:14500 words
Similar Standards: T/CCASC 3003-2023   T/CIQA 7-2020   T/CCASC 6007-2023   T/CCASC 3002-2023   GB/T 19502-2023   GB/T 43088-2023   GB/T 22461.1-2023   GB/T 42658.4-2023   GB/T 42659-2023   GB/T 42310-2023   GB/T 42518-2023   GB/T 22461.2-2023   GB/T 42543-2023   GB/T 42360-2023   GB/T 6488-2022   GB/T 21636-2021   GB/T 41073-2021   GB/T 41064-2021   GB/T 41076-2021   GB/T 29732-2021  
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