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Chinese National Standard Category: Semimetal and semiconductor material analysis method

English Title: Determination of total carbon content in trichlorosilane for silicon eqitaxy―Gas chromatographic method
Chinese Title: 硅外延用三氯氢硅中总碳的测定 气相色谱法
Standard No.: YS/T 1059-2015
Category No.: H17
Issued by: Ministry of Industry and Information Technology
Issued on: 2015-04-30
Implemented on: 2015-10-1
Status: valid
Superseded by:
Superseded on:
Abolished on:
Superseding:
Word Count:5500 words
Similar Standards: GB/T 1558-2023   GB/T 35306-2023   GB/T 24582-2023   GB/T 42263-2022   GB/T 42276-2022   GB/T 42274-2022   GB/T 24581-2022   GB/T 41153-2021   GB/T 39145-2020   GB/T 39144-2020   GB/T 38976-2020   GB/T 37385-2019   GB/T 37211.2-2018   GB/T 37211.1-2018   GB/T 4059-2018   GB/T 1557-2018   GB/T 4060-2018   GB/T 37049-2018   GB/T 35309-2017   GB/T 35306-2017  
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