Standard No.:	GB/T 28632-2012
English Name:	Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution
Chinese Name:	表面化学分析 俄歇电子能谱和X射线光电子能谱 横向分辨率测定
Chinese Classification:	G04    Basic standards and general methods
Professional Classification:	GB    National Standard
ICS Classification:	71.040.40 71.040.40    Chemical analysis 71.040.40
Source Content Issued by:	AQSIQ;SAC
Issued on:	2012-7-31
Implemented on:	2013-2-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	11000 words
Translation Price(USD):	330.0
Delivery:	via email in 1~3 business day

本标准规定了三种条件下测量俄歇电子能谱仪和X射线光电子能谱仪横向分辨率的方法。直边法适用于横向分辨率预期值大于1μm 的仪器。栅格法适合于横向分辨率预期值大于20nm,小于1μm 的仪器。金岛法则适用于横向分辨率预期值小于50nm 的仪器。
附录A、附录B和附录C给出了测量横向分辨率的带图的实例。