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| YS/T 1703-2024 Test method for surface particle of wafer box—Liquid particle count method (English Version) |
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Detail of YS/T 1703-2024
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Introduction of YS/T 1703-2024
本文件规定了液体颗粒计数仪测试晶片包装片盒表面颗粒的方法本文件适用于直径100mm、125mm、150mm、200mm、300mm的硅抛光片、硅外延片、SOI片及其他材质的半导体晶片包装片盒颗粒洁净度的测试
Contents of YS/T 1703-2024