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| Chinese National Standard Category: Metal physical property test method |
| English Title: | Practice for determining semiconductor wafer near-edge geometry—Part 1:Measured height data array using a curvature metric（ZDD） |
| Chinese Title: | 半导体晶片近边缘几何形态评价 第1部分：高度径向二阶导数法（ZDD） |
| Standard No.: | GB/T 43894.1-2024 |
| Category No.: | H21 |
| Issued by: | SAMR; SAC |
| Issued on: | 2024-4-25 |
| Implemented on: | 2024-11-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 6500 words |
| Similar Standards: |
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