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| Chinese National Standard Category: Rare light metals and their alloys |
| English Title: | High-purity sputtering titanium target used in integrated circuit |
| Chinese Title: | 集成电路用高纯钛溅射靶材 |
| Standard No.: | T/ZZB 0093-2016 |
| Category No.: | H64 |
| Issued by: | |
| Issued on: | 2016-09-10 |
| Implemented on: | |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | words |
| Similar Standards: |
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