Standard No.:	T/ZZB 0093-2016
English Name:	High-purity sputtering titanium target used in integrated circuit
Chinese Name:	集成电路用高纯钛溅射靶材
Chinese Classification:	H64    Rare light metals and their alloys
Professional Classification:	T/    Social Organization Standard
Issued on:	2016-09-10
Status:	valid
Target Language:	English
File Format:	PDF

本标准规定了集成电路用高纯钛溅射靶材的术语、定义、基本要求、技术要求、试验方法、检验规则和标志、包装、运输、贮存及质量承诺和服务保证。
本标准适用于集成电路中制造电子薄膜用的各类钛溅射靶材。