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Position: Chinese Standard in English/GB/T 14140-2009
GB/T 14140-2009   Test method for measuring diameter of semiconductor wafer (English Version)
Standard No.: GB/T 14140-2009 Status:to be superseded remind me the status change

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Target Language:English File Format:PDF
Word Count: 6000 words Translation Price(USD):180.0 remind me the price change

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Implemented on:2010-6-1 Delivery: via email in 1~3 business day

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,2026-2-1,2010-6-1,14113818188071A8257AA6E11DC0B
Standard No.: GB/T 14140-2009
English Name: Test method for measuring diameter of semiconductor wafer
Chinese Name: 硅片直径测量方法
Chinese Classification: H82    Elemental semiconductor material
Professional Classification: GB    National Standard
ICS Classification: 29.045 29.045    Semiconducting materials 29.045
Source Content Issued by: AQSIQ; SAC
Issued on: 2009-11-30
Implemented on: 2010-6-1
Status: to be superseded
Superseded by:GB/T 14140-2025 Test method for measuring diameter of semiconductor wafer
Superseded on:2026-2-1
Superseding:GB/T 14140.2-1993 Silicon slices and wafers-Measuring of diameter-Micrometer method
GB/T 14140.1-1993 Silicon slices and wafers--Measuring of diameter--Optical projecting method
Target Language: English
File Format: PDF
Word Count: 6000 words
Translation Price(USD): 180.0
Delivery: via email in 1~3 business day
本标准规定了用光学投影仪测量硅片直径的方法。
本标准适用于测量圆形硅片的直径,可测最大直径为300 mm。本标准不适用于测量硅片的不圆度。
Code of China
Standard
GB/T 14140-2009  Test method for measuring diameter of semiconductor wafer (English Version)
Standard No.GB/T 14140-2009
Statusto be superseded
LanguageEnglish
File FormatPDF
Word Count6000 words
Price(USD)180.0
Implemented on2010-6-1
Deliveryvia email in 1~3 business day
Detail of GB/T 14140-2009
Standard No.
GB/T 14140-2009
English Name
Test method for measuring diameter of semiconductor wafer
Chinese Name
硅片直径测量方法
Chinese Classification
H82
Professional Classification
GB
ICS Classification
Issued by
AQSIQ; SAC
Issued on
2009-11-30
Implemented on
2010-6-1
Status
to be superseded
Superseded by
GB/T 14140-2025 Test method for measuring diameter of semiconductor wafer
Superseded on
2026-2-1
Abolished on
Superseding
GB/T 14140.2-1993 Silicon slices and wafers-Measuring of diameter-Micrometer method
GB/T 14140.1-1993 Silicon slices and wafers--Measuring of diameter--Optical projecting method
Language
English
File Format
PDF
Word Count
6000 words
Price(USD)
180.0
Keywords
GB/T 14140-2009, GB 14140-2009, GBT 14140-2009, GB/T14140-2009, GB/T 14140, GB/T14140, GB14140-2009, GB 14140, GB14140, GBT14140-2009, GBT 14140, GBT14140
Introduction of GB/T 14140-2009
本标准规定了用光学投影仪测量硅片直径的方法。
本标准适用于测量圆形硅片的直径,可测最大直径为300 mm。本标准不适用于测量硅片的不圆度。
Contents of GB/T 14140-2009
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Keywords:
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