Standard No.:	GB/T 14602-1993
English Name:	for electronic industry. Hydrogen chloride
Chinese Name:	电子工业用气体 氯化氢
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Issued by:	AQSIQ
Issued on:	1993-8-26
Implemented on:	1994-7-1
Status:	superseded
Superseded by:	GB/T 14602-2014 Gases for electronic industry―Hydrogen chloride
Superseded on:	2015-7-1
Language:	English
File Format:	PDF
Word Count:	2500 words
Price(USD):	264.0
Delivery:	via email in 1~3 business day

本标准规定了氯化氢的技术要求、检验方法、检验规则以及包装、标志、运输、贮存和安全要求。本标准适用于以氢、氯为原料合成的氯化氢和以工业氯化氢为原料经净化制得的瓶装液态氯化氢。氯化氢主要用于电子工业，在集成电路生产中用于蚀刻、钝化、外延等工艺。也可用于金属冶炼、光导通讯和科学研究等领域。