Standard No.:	GB/T 14603-1993
English Name:	Gases for electronic industry. Boron trifluoride
Chinese Name:	电子工业用气体 三氟化硼
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Issued by:	SBTS
Issued on:	1993-08-26
Implemented on:	1994-7-1
Status:	abolished
Superseded by:	GB/T 14603-2009 Gases for electronic industry-Boron trifluoride
Superseded on:	2010-5-1
Abolished on:	2010-05-01
Language:	English
File Format:	PDF
Word Count:	2500 words
Price(USD):	220.00
Delivery:	via email in 1~3 business day

本标准规定了三氟化硼产品的技术要求、试验方法、检验规则、包装、标志、运输、贮存和安全要求。本标准适用于以氟硼酸钠为原料，采用热分解法制得的三氟化硼。主要用于半导体器件和集成电路生产的离子注入和掺杂。