Standard No.:	GB/T 14604-1993
English Name:	Gases for electronic industry. Oxygen
Chinese Name:	电子工业用气体 氧
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Source Content Issued by:	SBTS
Issued on:	1993-08-26
Implemented on:	1994-7-1
Status:	superseded
Superseded by:	GB/T 14604-2009 Gas for electronic industry—Oxygen
Superseded on:	2010-5-1
Abolished on:	2010-05-01
Target Language:	English
File Format:	PDF
Word Count:	3000 words
Translation Price(USD):	300.0
Delivery:	via email in 1~3 business day

本标准规定了电子工业用气体氧和散装液态氧的技术要求，检验方法，检验规则及产品的包装、标志、运输、贮存及安全要求。电子工业用氧主要用于二氧化硅化学气相淀积，用作氧化源和生产高纯水的反应剂，用于等离子体蚀刻和剥离。也可用于光导纤维。