GB/T 16942-2009 Gas for electronic industry - Hydrogen
1 Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage and transportation, and safety of hydrogen for electronic industry.
This standard is applicable to cylindered, container-compartmented and pipeline-transported hydrogen for electronic industry produced with the hydrogen as raw material by purification. They are mainly used to provide reducing atmosphere, as carrier gas for epitaxial processes and gas distribution raw materials for plasma etchants.
Molecular formula: H2.
Relative molecular mass: 2.01588 (as per the international relative atomic mass in 2005).
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of this standard. For dated references, subsequent amendments (excluding corrections) to, or revisions of, any of these publications do not apply to this standard. However parties to agreements based on this standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of the normative document referred to applies.
GB 190-2009 Packing symbol of dangerous goods
GB/T 3634.1 Hydrogen - Part 1: Industrial hydrogen
GB/T 3723 Sampling of chemical products for industrial use - Safety in sampling
GB 4962 Technical safety regulation for gaseous hydrogen use (GB 5099-1994, neq ISO 4705:1993)
GB/T 6285 Determination of trace oxygen in gases - Electrochemical method
GB 7144 Coloured cylinder mark for gases
GB/T 8984 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases - Gas chromatographic method
GB 14194 Rules for filling of permanent gas cylinders
Safety supervision regulations for gas cylinders
Supervision regulation on safety technology for pressure vessel
Provisions on the safety management and supervision for pressure pipelines
3 Technical requirements
The quality of hydrogen for electronic industry shall meet those specified in Table 1.
Table 1 Technical indicators
Foreword i
1 Scope
2 Normative references
3 Technical requirements
4 Test methods
5 Marking, packaging, storage and transportation, and safety
Annex A (Normative) Determination of nitrogen, carbon monoxide and carbon dioxide in hydrogen for electronic industry
GB/T 16942-2009 Gas for electronic industry - Hydrogen
1 Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage and transportation, and safety of hydrogen for electronic industry.
This standard is applicable to cylindered, container-compartmented and pipeline-transported hydrogen for electronic industry produced with the hydrogen as raw material by purification. They are mainly used to provide reducing atmosphere, as carrier gas for epitaxial processes and gas distribution raw materials for plasma etchants.
Molecular formula: H2.
Relative molecular mass: 2.01588 (as per the international relative atomic mass in 2005).
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of this standard. For dated references, subsequent amendments (excluding corrections) to, or revisions of, any of these publications do not apply to this standard. However parties to agreements based on this standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of the normative document referred to applies.
GB 190-2009 Packing symbol of dangerous goods
GB/T 3634.1 Hydrogen - Part 1: Industrial hydrogen
GB/T 3723 Sampling of chemical products for industrial use - Safety in sampling
GB 4962 Technical safety regulation for gaseous hydrogen use (GB 5099-1994, neq ISO 4705:1993)
GB/T 6285 Determination of trace oxygen in gases - Electrochemical method
GB 7144 Coloured cylinder mark for gases
GB/T 8984 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases - Gas chromatographic method
GB 14194 Rules for filling of permanent gas cylinders
Safety supervision regulations for gas cylinders
Supervision regulation on safety technology for pressure vessel
Provisions on the safety management and supervision for pressure pipelines
3 Technical requirements
The quality of hydrogen for electronic industry shall meet those specified in Table 1.
Table 1 Technical indicators
Contents of GB/T 16942-2009
Foreword i
1 Scope
2 Normative references
3 Technical requirements
4 Test methods
5 Marking, packaging, storage and transportation, and safety
Annex A (Normative) Determination of nitrogen, carbon monoxide and carbon dioxide in hydrogen for electronic industry
