GB/T 17865-1999 English Version, GB/T 17865-1999 Specification for measuring depth of focus and best focus (English Version)

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GB/T 17865-1999 Specification for measuring depth of focus and best focus (English Version)
Standard No.:	GB/T 17865-1999	Status:	valid remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	3000 words	Translation Price(USD):	140.0 remind me the price change Email:
Implemented on:	2000-6-1	Delivery:	via email in 1~3 business day

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Standard No.:	GB/T 17865-1999
English Name:	Specification for measuring depth of focus and best focus
Chinese Name:	焦深与最佳聚焦的测量规范
Chinese Classification:	L56 Semiconductor integrated circuit
Professional Classification:	GB National Standard
Source Content Issued by:	CBTS
Issued on:	1999-9-1
Implemented on:	2000-6-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	3000 words
Translation Price(USD):	140.0
Delivery:	via email in 1~3 business day

Standard

GB/T 17865-1999 Specification for measuring depth of focus and best focus (English Version)
Standard No.	GB/T 17865-1999
Status	valid
Language	English
File Format	PDF
Word Count	3000 words
Price(USD)	140.0
Implemented on	2000-6-1
Delivery	via email in 1~3 business day

Detail of GB/T 17865-1999

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Introduction of GB/T 17865-1999

本标准只涉及集成电路生产中所用的光刻技术及其关系密切的技术的聚集与焦深测量问题。由于设备技术多种多样，因而不可能提出这些参数的明确测量方法。本标准只提供基本准则。

Contents of GB/T 17865-1999

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