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Position: Chinese Standard in English/GB/T 18867-2002
GB/T 18867-2002   Gases for electronic industry--Sulfur hexafluoride (English Version)
Standard No.: GB/T 18867-2002 Status:superseded remind me the status change

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Target Language:English File Format:PDF
Word Count: 4000 words Translation Price(USD):120.0 remind me the price change

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Implemented on:2003-4-1 Delivery: via email in 1~3 business day

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,2015-7-1,2003-4-1,1411381817807000D4DB2920D4F44
Standard No.: GB/T 18867-2002
English Name: Gases for electronic industry--Sulfur hexafluoride
Chinese Name: 电子工业用气体 六氟化硫
Chinese Classification: G86    Industrial gas and chemical gas
Professional Classification: GB    National Standard
ICS Classification: 71.100.20 71.100.20    Gases for industrial application 71.100.20
Source Content Issued by: AQSIQ
Issued on: 2002-10-15
Implemented on: 2003-4-1
Status: superseded
Superseded by:GB/T 18867-2014 Gases for electronic industry―Sulphur hexaflouride
Superseded on:2015-7-1
Target Language: English
File Format: PDF
Word Count: 4000 words
Translation Price(USD): 120.0
Delivery: via email in 1~3 business day
本标准规定了电子工业用气体六氟化硫产品的技术要求、分析方法、检验规则以及包装、标志、运输、贮存和安全要求。本标准适用于硫与氟反应生成经精制和纯化制备的高纯度六氟化硫。该产品主要用作等离子蚀刻剂、掺杂剂、电子器件的外延气或稀释载气等。
Code of China
Standard
GB/T 18867-2002  Gases for electronic industry--Sulfur hexafluoride (English Version)
Standard No.GB/T 18867-2002
Statussuperseded
LanguageEnglish
File FormatPDF
Word Count4000 words
Price(USD)120.0
Implemented on2003-4-1
Deliveryvia email in 1~3 business day
Detail of GB/T 18867-2002
Standard No.
GB/T 18867-2002
English Name
Gases for electronic industry--Sulfur hexafluoride
Chinese Name
电子工业用气体 六氟化硫
Chinese Classification
G86
Professional Classification
GB
ICS Classification
Issued by
AQSIQ
Issued on
2002-10-15
Implemented on
2003-4-1
Status
superseded
Superseded by
GB/T 18867-2014 Gases for electronic industry―Sulphur hexaflouride
Superseded on
2015-7-1
Abolished on
Superseding
Language
English
File Format
PDF
Word Count
4000 words
Price(USD)
120.0
Keywords
GB/T 18867-2002, GB 18867-2002, GBT 18867-2002, GB/T18867-2002, GB/T 18867, GB/T18867, GB18867-2002, GB 18867, GB18867, GBT18867-2002, GBT 18867, GBT18867
Introduction of GB/T 18867-2002
本标准规定了电子工业用气体六氟化硫产品的技术要求、分析方法、检验规则以及包装、标志、运输、贮存和安全要求。本标准适用于硫与氟反应生成经精制和纯化制备的高纯度六氟化硫。该产品主要用作等离子蚀刻剂、掺杂剂、电子器件的外延气或稀释载气等。
Contents of GB/T 18867-2002
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Keywords:
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