Standard No.:	GB/T 18994-2003
English Name:	Gases for electronic industry—High purity chlorine
Chinese Name:	电子工业用气体 高纯氯
Chinese Classification:	G86    Industrial gas and chemical gas
Professional Classification:	GB    National Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Source Content Issued by:	AQSIQ
Issued on:	2003-03-05
Implemented on:	2003-8-1
Status:	superseded
Superseded by:	GB/T 18994-2014 Gases for electronic industry―High purity chlorine
Superseded on:	2015-7-1
Target Language:	English
File Format:	PDF
Word Count:	3000 words
Translation Price(USD):	344.0
Delivery:	via email in 1~3 business day

本标准规定了电子工业用气体高纯氯产品的技术要求、试验方法、检验以及包装、标志、运输、贮存和安全要求。本标准适用于以工业液氯为原料，采用物理吸附等过程生产的高纯氯产品。该产品主要用于大规模集成电路、光导纤维、高温超导、铝加工等高新技术领域。