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Position: Chinese Standard in English/GB/T 21287-2007
GB/T 21287-2007   Gases for electronic industry—Nitrogen trifluoride (English Version)
Standard No.: GB/T 21287-2007 Status:superseded remind me the status change

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Target Language:English File Format:PDF
Word Count: 10000 words Translation Price(USD):300.0 remind me the price change

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Implemented on:2008-7-1 Delivery: via email in 1~3 business day

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,2022-5-1,2008-7-1,14113818183067AA5D7D9243DCD5D
Standard No.: GB/T 21287-2007
English Name: Gases for electronic industry—Nitrogen trifluoride
Chinese Name: 电子工业用气体三氟化氮
Chinese Classification: G86    Industrial gas and chemical gas
Professional Classification: GB    National Standard
ICS Classification: 71.100.20 71.100.20    Gases for industrial application 71.100.20
Source Content Issued by: AQSIQ; SAC
Issued on: 2007-12-14
Implemented on: 2008-7-1
Status: superseded
Superseded by:GB/T 21287-2021 Electronic specialty gas—Nitrogen trifluoride
Superseded on:2022-5-1
Target Language: English
File Format: PDF
Word Count: 10000 words
Translation Price(USD): 300.0
Delivery: via email in 1~3 business day
本标准规定了瓶装电子工业用气体---三氟化氮的技术要求、试验方法、检验规则及包装、标志、运输、储存和安全。
本标准适用于电子工业用三氟化氮。它主要用作电子工业中等离子体工艺等离子体刻蚀剂和化学气相沉积的清洗剂。
Code of China
Standard
GB/T 21287-2007  Gases for electronic industry—Nitrogen trifluoride (English Version)
Standard No.GB/T 21287-2007
Statussuperseded
LanguageEnglish
File FormatPDF
Word Count10000 words
Price(USD)300.0
Implemented on2008-7-1
Deliveryvia email in 1~3 business day
Detail of GB/T 21287-2007
Standard No.
GB/T 21287-2007
English Name
Gases for electronic industry—Nitrogen trifluoride
Chinese Name
电子工业用气体三氟化氮
Chinese Classification
G86
Professional Classification
GB
ICS Classification
Issued by
AQSIQ; SAC
Issued on
2007-12-14
Implemented on
2008-7-1
Status
superseded
Superseded by
GB/T 21287-2021 Electronic specialty gas—Nitrogen trifluoride
Superseded on
2022-5-1
Abolished on
Superseding
Language
English
File Format
PDF
Word Count
10000 words
Price(USD)
300.0
Keywords
GB/T 21287-2007, GB 21287-2007, GBT 21287-2007, GB/T21287-2007, GB/T 21287, GB/T21287, GB21287-2007, GB 21287, GB21287, GBT21287-2007, GBT 21287, GBT21287
Introduction of GB/T 21287-2007
本标准规定了瓶装电子工业用气体---三氟化氮的技术要求、试验方法、检验规则及包装、标志、运输、储存和安全。
本标准适用于电子工业用三氟化氮。它主要用作电子工业中等离子体工艺等离子体刻蚀剂和化学气相沉积的清洗剂。
Contents of GB/T 21287-2007
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Keywords:
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