Standard No.:	GB/T 22572-2008
English Name:	Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
Chinese Name:	表面化学分析 二次离子质谱 用多δ层参考物质评估深度分辨参数的方法
Chinese Classification:	G04    Basic standards and general methods
Professional Classification:	GB    National Standard
ICS Classification:	71.040.40 71.040.40    Chemical analysis 71.040.40
Source Content Issued by:	AQSIQ; SAC
Issued on:	2008-12-11
Implemented on:	2009-10-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	3500 words
Translation Price(USD):	100.0
Delivery:	via email in 1~3 business day

本标准详细说明了在SIMS深度剖析中，用多δ层参考物质评估前沿衰变长度、后沿衰变长度和高斯展宽三个深度分辨参数的步骤。
由于样品表面的物理和化学态受一次入射离子影响而不稳定，本标准不适用于近表面区域的δ层。