Standard No.:	GB/T 29504-2013
English Name:	300 mm monocrystalline silicon
Chinese Name:	300mm 硅单晶
Chinese Classification:	H82    Elemental semiconductor material
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	AQSIQ;SAC
Issued on:	2013-5-9
Implemented on:	2014-2-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	4000 words
Translation Price(USD):	120.0
Delivery:	via email in 1~3 business day

本标准规定了直径300mm、p型、<100>晶向、电阻率0.5Ω·cm~20Ω·cm 硅单晶的技术要求、试验方法、检验规则以及标志、包装、运输、贮存等。
本标准适用于由直拉法制备的硅单晶,主要用于制作满足集成电路IC用线宽0.13μm 及以下技术需求的300mm 硅单晶抛光片。