Standard No.:	GB/T 29506-2013
English Name:	300 mm polished monocrystalline silicon wafers
Chinese Name:	300mm 硅单晶抛光片
Chinese Classification:	H82    Elemental semiconductor material
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	AQSIQ;SAC
Issued on:	2013-5-9
Implemented on:	2014-2-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	6000 words
Translation Price(USD):	160.0
Delivery:	via email in 1~3 business day

本标准规定了直径300mm、p型、<100>晶向、电阻率0.5Ω·cm~20Ω·cm 规格的硅单晶抛光片的术语和定义、技术要求、试验方法、检测规则以及标志、包装、运输、贮存等。
本标准适用于直径300mm 直拉单晶磨削片经双面抛光制备的硅单晶抛光片,产品主要用于满足集成电路IC用线宽90nm 技术需求的衬底片。