Standard No.:	GB/T 29508-2013
English Name:	300 mm monocrystalline silicon as cut slices and grinded slices
Chinese Name:	300mm 硅单晶切割片和磨削片
Chinese Classification:	H82    Elemental semiconductor material
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	AQSIQ;SAC
Issued on:	2013-5-9
Implemented on:	2014-2-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	6000 words
Translation Price(USD):	140.0
Delivery:	via email in 1~3 business day

本标准规定了直径300mm、p型、<100>晶向、电阻率0.5Ω·cm~20Ω·cm 的硅单晶切割片和磨削片(简称硅片)产品的术语和定义、技术要求、试验方法、检验规则以及标志、包装、运输、贮存等。
本标准适用于直径300mm 直拉单晶经切割、磨削制备的圆形硅片,产品将进一步加工成抛光片,用于制作集成电路IC用线宽90nm 技术需求的衬底片。