Standard No.:	GB/T 30653-2014
English Name:	Test method for crystal quality of Ⅲ-nitride epitaxial layers
Chinese Name:	Ⅲ族氮化物外延片结晶质量测试方法
Chinese Classification:	H21    Metal physical property test method
Professional Classification:	GB    National Standard
ICS Classification:	77.040.20 77.040.20    Non-destructive testing of metals 77.040.20
Source Content Issued by:	AQSIQ; SAC
Issued on:	2014-12-31
Implemented on:	2015-9-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	5500 words
Translation Price(USD):	150.0
Delivery:	via email in 1~3 business day

本标准规定了利用高分辨X射线衍射仪测试Ⅲ族氮化物外延片结晶质量的方法原理、仪器、测试环境、样品、测试、测试结果的分析、精密度以及测试报告。
本标准适用于在氧化物衬底（Al2O3、ZnO等）或半导体衬底（GaN、Si、GaAs、SiC等）上外延生长的氮化物(Ga、In、Al)N单层或多层异质外延片结晶质量的测试。其他异质外延片结晶质量的测试也可参考本标准。