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Standard
| GB/T 34177-2017 Quartz glass wafer for lithography (English Version) |
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Detail of GB/T 34177-2017
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Introduction of GB/T 34177-2017
本标准规定了光刻用石英玻璃晶圆（以下简称石英玻璃晶圆)的术语和定义、分类、要求、试验方法、检验规则及标志、包装、运输和贮存。本标准适用于半导体集成电路、光通讯、微机电系统（MEMS)、光电器件和发光二极管（LED)等光刻工艺中用做衬底的石英玻璃晶圆。
Contents of GB/T 34177-2017