GB/T 36306-2024 Cleanroom and associated controlled environments — Technical requirements of air chemical contamination control
1 Scope
This document specifies the technical requirements for the air chemical contaminant control in cleanroom and associated controlled environments, including contamination source, air chemical contamination control, detection and monitoring.
This document is applicable to the air chemical contaminant control in cleanroom and associated controlled environments.
2 Normative references
The following documents contain requirements which, through reference in this text, constitute provisions of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
GB/T 25915.8-2021 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
air cleanliness by chemical concentration; ACC
the maximum allowable concentration, in grams per cubic meter and expressed in ISO-ACC, for a given class or group of chemical species
Note: Biomacromolecules are classified as particles and are not included in this definition.
[Source: GB/T 25915.8-2021, 3.1.2]
3.2
air chemical contaminant
substances in the form of gas or vapor, whose chemical properties can have adverse effects on products, processes, and equipment in cleanroom and associated controlled environments
3.3
outgassing
chemical substances in gaseous or vapor form that are released from equipment and materials
[Source : GB/T 25915.8-2021, 3.1.7, modified]
4 Contamination source
4.1 Outdoor contamination source
Chemicals that exist in the outdoor atmosphere that may be harmful to cleanroom products, processes, and equipment, mainly include sulfur oxides, nitrogen oxides, ozone, ammonia, volatile organic compounds, etc.
4.2 Indoor contamination source
Chemical substances produced in cleanroom that are harmful to products, processes and equipment, mainly include hydrofluoric acid, hydrochloric acid, sulfuric acid, nitric acid, sulfur oxide, ammonia, amine, coagulable organic compounds, boron, phosphorus, ozone, etc. Main sources:
— the release of sweat, protective equipment and cosmetics of the operators;
— the dispersion of photoresist, developer, cleaning agent, abrasive liquid, photoresist removal agent and other chemicals used in production;
— the release of equipment, machine maintenance, construction materials, etc.
Contents
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Contamination source
5 Air chemical contamination control
6 Detection and monitoring
Annex A (Informative) Selection of materials for cleanroom construction
Annex B (Informative) Air chemical contamination control system for cleanroom of electronics industry
Annex C (Informative) Data sheet for air chemical contaminant control in cleanroom of microelectronics industry
Annex D (Informative) Chemical concentration control measures during cleanroom construction
Bibliography
GB/T 36306-2024 Cleanroom and associated controlled environments — Technical requirements of air chemical contamination control
1 Scope
This document specifies the technical requirements for the air chemical contaminant control in cleanroom and associated controlled environments, including contamination source, air chemical contamination control, detection and monitoring.
This document is applicable to the air chemical contaminant control in cleanroom and associated controlled environments.
2 Normative references
The following documents contain requirements which, through reference in this text, constitute provisions of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
GB/T 25915.8-2021 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
air cleanliness by chemical concentration; ACC
the maximum allowable concentration, in grams per cubic meter and expressed in ISO-ACC, for a given class or group of chemical species
Note: Biomacromolecules are classified as particles and are not included in this definition.
[Source: GB/T 25915.8-2021, 3.1.2]
3.2
air chemical contaminant
substances in the form of gas or vapor, whose chemical properties can have adverse effects on products, processes, and equipment in cleanroom and associated controlled environments
3.3
outgassing
chemical substances in gaseous or vapor form that are released from equipment and materials
[Source : GB/T 25915.8-2021, 3.1.7, modified]
4 Contamination source
4.1 Outdoor contamination source
Chemicals that exist in the outdoor atmosphere that may be harmful to cleanroom products, processes, and equipment, mainly include sulfur oxides, nitrogen oxides, ozone, ammonia, volatile organic compounds, etc.
4.2 Indoor contamination source
Chemical substances produced in cleanroom that are harmful to products, processes and equipment, mainly include hydrofluoric acid, hydrochloric acid, sulfuric acid, nitric acid, sulfur oxide, ammonia, amine, coagulable organic compounds, boron, phosphorus, ozone, etc. Main sources:
— the release of sweat, protective equipment and cosmetics of the operators;
— the dispersion of photoresist, developer, cleaning agent, abrasive liquid, photoresist removal agent and other chemicals used in production;
— the release of equipment, machine maintenance, construction materials, etc.
Contents of GB/T 36306-2024
Contents
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Contamination source
5 Air chemical contamination control
6 Detection and monitoring
Annex A (Informative) Selection of materials for cleanroom construction
Annex B (Informative) Air chemical contamination control system for cleanroom of electronics industry
Annex C (Informative) Data sheet for air chemical contaminant control in cleanroom of microelectronics industry
Annex D (Informative) Chemical concentration control measures during cleanroom construction
Bibliography
