Standard No.:	GB/T 4061-2009
English Name:	Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
Chinese Name:	硅多晶断面夹层化学腐蚀检验方法
Chinese Classification:	H80    Semimetal and semiconductor material in general
Professional Classification:	GB    National Standard
ICS Classification:	29.045 29.045    Semiconducting materials 29.045
Source Content Issued by:	AQSIQ; SAC
Issued on:	2009-10-30
Implemented on:	2010-6-1
Status:	valid
Superseding:	GB/T 4061-1983 Polycrystalline silicon--Examination method--Assessment of sandwiches on cross-section by chemical corrosion
Target Language:	English
File Format:	PDF
Word Count:	4000 words
Translation Price(USD):	80.0
Delivery:	via email in 1~3 business day

本标准规定了以三氯氢硅和四氯化硅为原料在还原炉内用氢气还原出的硅多晶棒的断面夹层化学腐蚀检验方法。
本标准关于断面夹层的检验适用于以三氯氢硅和四氯化硅为原料,以细硅芯为发热体,在还原炉内用氢气还原沉积生长出来的硅多晶棒。