Standard No.:	GB/T 42106-2022
English Name:	Nanotechnology—Fabrication of three dimensional nanostructures and devices—A strain method induced by ion beam irradiation
Chinese Name:	纳米技术 三维纳米结构与器件的加工方法 离子束辐照诱导应变法
Chinese Classification:	A42    Physics and Mechanics
Professional Classification:	GB    National Standard
Source Content Issued by:	SAMR; SAC
Issued on:	2022-12-30
Implemented on:	2023-7-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	4500 words
Translation Price(USD):	135.0
Delivery:	via email in 1~3 business day

本文件描述了离子束辐照诱导应变技术构建三维纳米结构与器件的加工方法，主要包括加工原理、　材料与设备、环境条件、加工方法。
本文件适用于离子束辐照诱导直立纳米线和平面纳米薄膜的空间应变，进而实现三维空间中由一维纳米线和二维纳米薄膜构成的三维纳米结构与器件。