JB/T 5630-1991 English Version, JB/T 5630-1991 Diffusion Furnace for Semiconductor Devices. Grading of Energy Consumption (English Version)

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JB/T 5630-1991 Diffusion Furnace for Semiconductor Devices. Grading of Energy Consumption (English Version)
Standard No.:	JB/T 5630-1991	Status:	valid remind me the status change Email:
Target Language:	English	File Format:	PDF
Word Count:	2000 words	Translation Price(USD):	184.0 remind me the price change Email:
Implemented on:	1992-7-1	Delivery:	via email in 1~3 business day

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Standard No.:	JB/T 5630-1991
English Name:	Diffusion Furnace for Semiconductor Devices. Grading of Energy Consumption
Chinese Name:	半导体器件扩散炉能耗分等
Chinese Classification:	J01 Technical management
Professional Classification:	JB Professional Standard - Machinery
Source Content Issued by:	Ministry of Electronics Industry
Issued on:	1991-9-13
Implemented on:	1992-7-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	2000 words
Translation Price(USD):	184.0
Delivery:	via email in 1~3 business day

Standard

JB/T 5630-1991 Diffusion Furnace for Semiconductor Devices. Grading of Energy Consumption (English Version)
Standard No.	JB/T 5630-1991
Status	valid
Language	English
File Format	PDF
Word Count	2000 words
Price(USD)	184.0
Implemented on	1992-7-1
Delivery	via email in 1~3 business day

Detail of JB/T 5630-1991

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Introduction of JB/T 5630-1991

本标准规定了半导体器件扩散炉（以下简称扩散炉）能耗分等。
本标准适用于电子工业企业半导体器件制造过程中用作各种扩散、氧化、退火和合金工艺以及对其他材料进行特殊处理的扩散炉。

Contents of JB/T 5630-1991

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