1. Scope
This Rule is applicable to all kinds of scanning electron microscopes and X-ray energy spectrometers.
2. Definitions
2.1 Secondary electron
It refers to the outgoing electron from solid sample, under the action of incident electron, with the energy lower than 50eV, normally represented by SE.
2.2 Backscattered electron
It refers to the incident electron reflected by atoms of the solid sample, including elastic and non-elastic back scattered electrons, normally represented by BSE. It is also referred to as reflected electron, represented by RE. The elastic back scattered electrons are those of which the movement direction is totally altered yet the energy basically remains the same; and the non-elastic ones are those of which not only the movement direction is altered, but also the energy is reduced to different extends.
2.3 Magnification
The magnification of a scanning electron microscope refers to the linear amplification times of its images, represented by M. If the information of a line on the sample with the length of Ls imaged on the charactron with the length of Lc, the magnification equals to:
1. Scope
This Rule is applicable to all kinds of scanning electron microscopes and X-ray energy spectrometers.
2. Definitions
2.1 Secondary electron
It refers to the outgoing electron from solid sample, under the action of incident electron, with the energy lower than 50eV, normally represented by SE.
2.2 Backscattered electron
It refers to the incident electron reflected by atoms of the solid sample, including elastic and non-elastic back scattered electrons, normally represented by BSE. It is also referred to as reflected electron, represented by RE. The elastic back scattered electrons are those of which the movement direction is totally altered yet the energy basically remains the same; and the non-elastic ones are those of which not only the movement direction is altered, but also the energy is reduced to different extends.
2.3 Magnification
The magnification of a scanning electron microscope refers to the linear amplification times of its images, represented by M. If the information of a line on the sample with the length of Ls imaged on the charactron with the length of Lc, the magnification equals to:
