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| SJ/T 11829.1-2022 (English Version) |
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Detail of SJ/T 11829.1-2022
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Introduction of SJ/T 11829.1-2022
本文件规定了晶体硅光伏电池用管式等离子体增强化学气相淀积（PECVD）设备的术语和定义、型号命名、工作环境、要求、检验方法、检验规则以及包装、标志、搬运和运输、贮存等。
本文件适用于晶体硅光伏电池用管式 PECVD 设备，产品主要用于在晶体硅光伏电池减反射膜、钝化膜的淀积与氢钝化。
Contents of SJ/T 11829.1-2022