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Standard
SJ/T 11864-2022 (English Version) |
Detail of SJ/T 11864-2022
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Introduction of SJ/T 11864-2022
本文件规定了半绝缘型碳化硅(SiC)单晶衬底的术语、分类、要求、检验方法、检验规则以及标志、包装、运输、贮存等。
本文件适用于经抛光后制备的Φ50.8 mm,Φ76.2 mm,Φ100.0mm,Φ150.0 mm 半绝缘型 SiC 衬底,晶型为 4H。
Contents of SJ/T 11864-2022