Standard No.:	SJ/T 11865-2022
Chinese Name:	功率器件用Φ150 mm n型碳化硅衬底
Professional Classification:	SJ    Professional Standard - Electronics
Source Content Issued by:	MIIT
Issued on:	2022-10-20
Implemented on:	2023-1-1
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了功率器件用Φ150mm n 型碳化硅（SiC）衬底的术语、要求、检验方法、检验规则、标志、包装、运输和储存。适用于经抛光后制备的Φ150mm n 型 SiC 衬底，晶型为 4H。