Standard No.:	T/CEMIA 030-2022
English Name:	Positive photoresist developer for semiconductor manufacture
Chinese Name:	半导体用正胶显影液
Chinese Classification:	L90    Special electronic technology material
Professional Classification:	T/    Social Organization Standard
Source Content Issued by:	CEMIA
Issued on:	2022-04-20
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	7500 words
Translation Price(USD):	225.0
Delivery:	via email in 1~3 business day

本文件规定了半导体用正胶显影液的分类和标记、要求、检验方法、检验规则以及标志、包装、运输、贮存和安全。
本文件适用于半导体用正胶显影液，其主要组分为通过季铵盐化合物电解制得的四甲基氢氧化铵。
四甲基氢氧化铵的基本信息见附录A中的A.1。