Standard No.:	T/CHPSA MF006-2024
English Name:	Technical specification for contamination and surface roughness of wet components made of ultrapure polymer materials used in semiconductor processing
Chinese Name:	航空航天用聚四氟乙烯密封材料
Professional Classification:	T/    Social Organization Standard
ICS Classification:	49.025.40 49.025.40    Rubber and plastics 49.025.40
Source Content Issued by:	China Hydraulic & Pneumatic Seals Association
Issued on:	2024-12-30
Implemented on:	2025-1-30
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了航空航天用聚四氟乙烯密封材料的类型、要求、检验方法、检验规则、标志、包装、运输和贮存。