Standard No.:	T/CPIA 0059-2024
English Name:	Low pressure chemical vapor deposition equipment used for crystalline silicon photovoltaic cells
Chinese Name:	晶体硅光伏电池用低压化学气相淀积设备
Chinese Classification:	H95    Metallurgy heating and heat treatment equipment
Professional Classification:	T/    Social Organization Standard
Source Content Issued by:	China Photovaltaic Industry Association
Issued on:	2024-03-01
Implemented on:	2024-3-15
Status:	valid
Target Language:	English
File Format:	PDF

本文件规定了晶体硅光伏电池用低压化学气相淀积设备的术语和定义、工作环境、技术要求、基本性能、检验方法、交付检验以及标志、包装、搬运和运输、贮存。
本文件适用于晶体硅光伏电池用管式LPCVD设备的生产及检验。其他类型LPCVD设备可参考使用。LPCVD设备可进行隧穿氧化层、本征多晶硅（Poly-Si）层、原位掺杂多晶硅（Poly-Si）层等的工艺制备。