Standard No.:	T/ICMTIA 1-2019
English Name:	The Integrated Circuit Materials Industry Technology Innovative Alliance—Gas base specification
Chinese Name:	集成电路材料产业技术创新联盟 气体基础规范
Chinese Classification:	G04    Basic standards and general methods
Professional Classification:	T/    Social Organization Standard
ICS Classification:	71.100.20 71.100.20    Gases for industrial application 71.100.20
Source Content Issued by:	ICMTIA
Issued on:	2019-04-17
Implemented on:	2019-10-10
Status:	valid
Target Language:	English
File Format:	PDF

本标准规范了集成电路制造用气体的生产、研发和使用的管理要求及相关测试程序，是气体生产管理和使用的指南。