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| T/ICMTIA TG0036-2023 (English Version) |
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Introduction of T/ICMTIA TG0036-2023
本文件规定了集成电路用高纯铝钪合金靶材的要求、试验方法、检验规则及标志、包装、运输、贮存、订货单（或合同）等内容。
本文件适用于集成电路制造用高纯铝钪合金靶材，以下简称铝钪合金靶。
Contents of T/ICMTIA TG0036-2023
