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Standard
| YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film (English Version) |
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Detail of YS/T 1025-2015
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Introduction of YS/T 1025-2015
本标准规定了电子薄膜用高纯钨及钨合金溅射靶材的要求、试验方法、检验规则及标志、包装、运输存贮、订货单（或合同）等内容。本标准适用于电子薄膜用高纯钨及钨合金溅射靶材，简称高纯钨及钨合金靶。
Contents of YS/T 1025-2015