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| YS/T 1068-2015 Ruthenium powder for ruthenium sputttering target (English Version) |
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Detail of YS/T 1068-2015
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Introduction of YS/T 1068-2015
本标准规定了磁记录及集成电路领域钌系溅射靶材用钌粉的要求、试验方法、检验规则及标志、包装、运输、贮存、质量证明书和合同（或订货单）内容。
本标准适用于制备磁记录及集成电路领域钌系溅射靶材用钌粉。
Contents of YS/T 1068-2015