Standard No.:	GB/T 34898-2017
English Name:	Micro electromechanical system technology-Test method for the nonlinear vibration of the MEMS resonant sensitive element
Chinese Name:	微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法
Chinese Classification:	L55    Microcircuit in general
Professional Classification:	GB    National Standard
Source Content Issued by:	AQSIQ; SAC
Issued on:	2017-11-01
Implemented on:	2018-5-1
Status:	valid
Target Language:	English
File Format:	PDF
Word Count:	7500 words
Translation Price(USD):	225.0
Delivery:	via email in 1~3 business day

本标准规定了谐振式传感器中MENS谐振敏感元件非线性振动特性参数的测试方法。
本标准适用于敏感元件在研制和生产过程中关于非线性振动特性和敏感元件闭环系统频率偏移的测试，其他非MENS敏感元件可参考使用。