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| Chinese National Standard Category: Metal physical property test method |
| English Title: | Test method for surface defects on silicon carbide epitaxial wafers―Laser scattering method |
| Chinese Title: | 碳化硅外延片表面缺陷的测试 激光散射法 |
| Standard No.: | GB/T 42902-2023 |
| Category No.: | H21 |
| Issued by: | SAMR; SAC |
| Issued on: | 2023-08-06 |
| Implemented on: | 2024-3-1 |
| Status: | valid |
| Superseded by: | |
| Superseded on: | |
| Abolished on: | |
| Superseding: | |
| Word Count: | 8500 words |
| Similar Standards: | GB 1552-1979 GB 5251-1985 GB/T 41079.3-2024 GB/T 44558-2024 GB/T 44330-2024 GB/T 24578-2024 GB/T 43894.1-2024 GB/T 43315-2023 GB/T 43313-2023 GB/T 43096-2023 GB/T 43092-2023 GB/T 23365-2023 GB/T 43093-2023 GB/T 42902-2023 GB/T 1555-2023 GB/T 42676-2023 GB/T 42905-2023 GB/T 42789-2023 GB/T 42907-2023 GB/T 6616-2023 |
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