English Title: | Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films—Noncontact eddy-current gauge |
Chinese Title: | 半导体晶片电阻率及半导体薄膜薄层电阻的测试 非接触涡流法 |
Standard No.: | GB/T 6616-2023 |
Category No.: | H21 |
Issued by: | SAMR; SAC |
Issued on: | 2023-08-06 |
Implemented on: | 2024-3-1 |
Status: | valid |
Superseded by: | |
Superseded on: | |
Abolished on: | |
Superseding: | GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
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Word Count: | 7500 words |
Similar Standards: |
GB 1552-1979
GB 5251-1985
GB/T 41079.3-2024
GB/T 44558-2024
GB/T 44330-2024
GB/T 24578-2024
GB/T 43894.1-2024
GB/T 43315-2023
GB/T 43313-2023
GB/T 43096-2023
GB/T 43092-2023
GB/T 23365-2023
GB/T 43093-2023
GB/T 42902-2023
GB/T 1555-2023
GB/T 42676-2023
GB/T 42905-2023
GB/T 42789-2023
GB/T 42907-2023
GB/T 6616-2023
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